University of the Basque Country University of the Basque Country

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Info_Biomedicina_mic_mat_HELIOS

ELECTRONIC MICROSCOPY AND MATERIAL MICROANALYSIS

Equipment

Team: MEB-FIB.

Brand: FEI.

Model: Helios Nanolab 650.

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Description: The FEI Helios NanoLab DualBeam 650 is a scanning electron microscope (SEM)/focused ion beam (FIB) workstation capable of performing advanced nanoanalysis and sample preparation. For site-specific TEM samples, FIB-SEM is commonly used to produce electron-transparent membranes with the use of focused gallium ion beams. In addition, the Helios Nanolab 650 FIB-SEM has a wide variety of detectors capable of offering excellent SEM image quality.

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Applications:

  • Extraction of lamellae.
  • Acquire the image of the sample surface with electrons.
  • It gives the transmission image of the samples thinned with the ion beam.
  • Allows microanalysis of samples.

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Technical specifications:

  • Resolution at the coincidence point of 4.5nm. Ion beam current up to 65nA.
  • 5 gas injectors for the deposition of: Pt, W, C, an insulator (TEOS) and an attack gas (XeF2).
  • Secondary electron and backscattered electron detectors.
  • Omniprobe Autoprobe 200.2 micromanipulator.
  • Ion detector that can acquire both the image given by the ions and the secondary electrons.
  • STEM detector.
  • EDX Aztec Energy 350 microanalysis system with Oxford dry detector whose resolution is 124eV (

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Responsible(s):

  • Sergio Fernandez

Location:

  • Rosalin Franklin Building
  • Sarriena neighborhood s/n. 48940. Leioa. Bizkaia.

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Contact:

Service technician